About the project

In various wafer handling systems in semiconductor industry, wafers need to be aligned with sub-mu precision. Focal has developed a flexible area scan module. It consists of an area scan camera, imaging and illumination optics, and image analysis software. The module enables the monitoring of the wafer position with precision while the wafer is being handled by a manipulator with a large stroke in all directions.

  • 2013 - 2014
  • Hightech Optical Systems
  • Hightech Optical Systems
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