Within the H2020 project ADALAM, a novel depth sensor was successfully integrated into a laser micromachining system. This new sensor allows the machine to get feedback on the real machined depth, which is used to automatically adapt the micromachining process.

Typical specifications that have been achieved

• The measurement reproducibility is ±1.5 μm
• The measurement range is 900 μm
• The exposure time at the darkest spot is near 1 ms