About the project

Within the H2020 project ADALAM, a novel depth sensor was successfully integrated into a laser micromachining system. This new sensor allows the machine to get feedback on the real machined depth, which is used to automatically adapt the micromachining process. This process results in an increased depth accuracy of the machined structures.

Demcon Focal’s contribution were the development of the sensor including the automatic reference arm and the interfacing with the existing micromachining system. The sensor was based on a frequency domain low coherence interferometer in the beam path of the laser micromachining system.

The integrated depth sensor can be used to:

  • measure the surface topography before machining, to scan for existing surface deviations that can be removed in an automatically generated machining process,
  • measure complex shaped objects prior to machining, to precisely align the machining pattern to the work piece,
  • measure the surface topography while machining a part, in order to adapt the micromachining process, leading to highly increased machining accuracies and no defects, and
  • quickly validate results after machining.

Typical specifications that have been achieved

  • The measurement reproducibility is ±1.5 μm
  • The measurement range is 900 μm
  • The exposure time at the darkest spot is near 1 ms

Horizon 2020

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