About the project
Laser annealing in the semicon market is growing rapidly. The elementary module for the laser annealing process is a laser beam delivery system that conditions the laser beam such that uniform annealing is achieved over the surface. Demcon, in cooperation with a system integrator, has developed a laser annealing module.
Our contribution:
- The development of a custom made F-theta lens with a long working distance
- Reduction of angular displacement errors due to manufacturing tolerances
- Tooling for optical alignment and qualification
Project specifications
- Focal length of 280 mm
- Scan range of 7 mm with ± 4 degree (Gaussian) input beams
- 500 W laser with wavelength of 500 nm
- F-theta distortion less then 0.01%