About the project

Laser annealing in the semicon market is growing rapidly. The elementary module for the laser annealing process is a laser beam delivery system that conditions the laser beam such that uniform annealing is achieved over the surface. Demcon, in cooperation with a system integrator, has developed a laser annealing module.

Our contribution:

  • The development of a custom made F-theta lens with a long working distance
  • Reduction of angular displacement errors due to manufacturing tolerances
  • Tooling for optical alignment and qualification

Project specifications

  • Focal length of 280 mm
  • Scan range of 7 mm with ± 4 degree (Gaussian) input beams
  • 500 W laser with wavelength of 500 nm
  • F-theta distortion less then 0.01%
Do you have a question about this use case? Feel free to contact us.

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