Laser annealing in the semicon market is growing rapidly. The elementary module for the laser annealing process is a laser beam delivery system that conditions the laser beam such that uniform annealing is achieved over the surface. Demcon, in cooperation with a system integrator, has developed a laser annealing module.

Our contribution:

• The development of a custom made F-theta lens with a long working distance
• Reduction of angular displacement errors due to manufacturing tolerances
• Tooling for optical alignment and qualification

Project specifications

• Focal length of 280 mm
• Scan range of 7 mm with ± 4 degree (Gaussian) input beams
• 500 W laser with wavelength of 500 nm
• F-theta distortion less then 0.01%